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Product Lineup
Thermal Analysis (DSC, TG, DTA, TMA, DMA)
Scanning Probe Microscope (SPM)
Focused Ion Beam (FIB) / Scanning Ion Microscope (SIM)
ICP-OES(ICP-AES). ICP-MS
Photomask Repair
XRF Analysis
XRF Coating Thickness Measurements
Mask Data Preparation Software (MDP)
X-ray Detector
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Hitachi High-Tech Science Corporation is a solutions company that assists manufacturing industries in key processes including development, production and inspection. We offer solutions that meet your needs in analysis, measurement and observation.

 Thermal Analysis

EXSTAR 7000 series is the thermal analysis system with excellent sensitivity, extensibility, and ease of operation.

 Scanning Probe Microscope

New Product: NanoNavi Station is now available! Realizing ultimate measurement performance and best-suited for high aspect samples.

 Focused Ion Beam / Scanning Ion Microscope

Wide varieties of FIB systems supporting high resolution observation and microfabrication in R&D and electronic devices inspection.

 ICP-OES/ICP-MS

Various product lineup of ICP-OES and ICP-MS. Support diversified needs in element analysis by its high sensitivity and ease of operation.

 Device Observation/Photomask Repair

Lineup of cutting edge mask repair systems realizing highly accurate repair in the latest generation electronic devices.

 XRF Analysis

Lineup of XRF analyzers, commanding attention in use in environmental field. WEEE&RoHS, ELV compliant types and soil investigation type are also available.

 XRF Coating Thickness Gauge

Lineup of SFT9000 series, covering standard type to high-grade type with dual-detector.

 Mask Data Preparation Software (MDP)

Lineup of software achieving cost and time reduction in handling semiconductor photomask data.
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mdp photo

 X-ray Detector

Sillicon multi-cathode detectors and spectrometers for fluorescent X-ray and scanning electron microscopes, featuring LN2 free, high resolution and high count rate.
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x-ray detector